Please use this identifier to cite or link to this item: http://ptsldigitalv2.ukm.my:8080/jspui/handle/123456789/519120
Title: Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs
Authors: Norhayati Soin
Keywords: Diaphragm (Mechanical devices) - Design and construction
Microelectromechanical systems
Issue Date: 2006
Call Number: TJ247.N676 2006
Publisher: UKM, Bangi
Appears in Collections:Faculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina

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